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要約（サマリー）

In a 300 mm semiconductor fab, the role of Automatic Material Handling System (AMHS) is more significant than in 200 mm fab. In 300 mm fabs, it is important to minimize adverse influences by AMHS delivery time on fab productivity. Because of this, it is very important to estimate the influence of AMHS. This paper outlines the influence that AMHS has on the relationship between lot cycle time and throughput in full-automated fab. During our study we found a kind of threshold. If delivery time becomes longer than the threshold, adverse influence of AMHS on the whole fab increases dramatically.

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