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要約（サマリー）

Direct tool-to-tool delivery is one of technical topics for excellent fab performance. Automated Material Handling System (AMHS) vendors supply unified OHT systems that can provide direct tool-to-tool delivery routes. But providing such routes is not sufficient to realize direct deliveries. The purpose of our study is to identify remaining issues required to realize direct tool-to-tool delivery. Our conclusions are (1) AMHS cannot realize direct tool-to-tool delivery by itslef without any degradation of fab throughput, and (2) effective algorithms for lot scheduling / dispatchng and variability reduction of tool process rate are required to realize it without such degradation.

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