眠っている学術論文や研究成果を投稿・共有するサイトです。Creative Commonsにも対応。

要約（サマリー）

Demands to reduce semiconductor fab lot cycle time are increasing more and more. Small lot manufacturing (SLM) is proposed as a promising way to reduce cycle times considerably. However there are many detractors against realizing effective SLM. Some of them are related to Automated Manufacturing Handling Systen (AMHS). This paper describes these detractors and discusses potential solutions for them. We conclude that AMHS solutions for SLM should stress more transport capacity and shorter Carrier Exchange Time (CET) rather than shorter delivery time. We also conclude that mathematical models are more intuitive and useful than simulation models for such studies.

参考文献目録